Fabricating and cleaning chamber components having textured...

Details Fabricating and cleaning chamber components having textured... Fabricating and cleaning chamber components having textured...

2011-08-09

2011-08-09

Kornakov, Michael (Department: 1714)

Cleaning and liquid contact with solids

Processes

Hollow work, internal surface treatment

C134S026000, C134S001000, C134S022100

Reexamination Certificate

active

07993470

ABSTRACT:
A method of fabricating a substrate processing chamber component involves forming a component having a textured surface and sweeping a jet of pressurized fluid across the textured surface of the component. The jet of fluid is pressurized sufficiently high to dislodge substantially all the particles from the textured surface. The method can be applied to dislodge grit particles from textured exposed surfaces formed by electromagnetic energy beam scanning and grit blasting. The method can also be applied to remove loosely adhered coating particles from the textured surfaces of coated components.

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