Extraction method of defect density and size distributions

Details Extraction method of defect density and size distributions Extraction method of defect density and size distributions

2006-04-04

2006-04-04

Garbowski, Leigh M. (Department: 2825)

Computer-aided design and analysis of circuits and semiconductor

Nanotechnology related integrated circuit design

C257S048000, C716S030000, C716S030000

Reexamination Certificate

active

07024642

ABSTRACT:
A characterization vehicle includes a substrate having at least one layer (300), and a plurality of pairs of nested serpentine lines on a single surface of a single layer of the substrate (301a. . . 301h, 302a. . . 302h), each pair of nested serpentine lines having a shared pad between them (312a. . . 312h).

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Communication from European Patent Office dated Jun. 23, 2005.

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