Photocopying – Projection printing and copying cameras – Step and repeat
Patent
1997-01-15
1999-04-27
Metjahic, Safet
Photocopying
Projection printing and copying cameras
Step and repeat
355 77, G03B 2742, G03B 2732
Patent
active
058984771
ABSTRACT:
An exposure apparatus includes a mask scanning device for scanning a mask on which a pattern is formed, a projection optical system for projecting the pattern on the mask onto a wafer, a wafer scanning device for scanning the wafer, onto which the pattern is projected by the projection optical system, an illuminating device for illuminating the mask in an illumination area narrower than the pattern by synchronously scanning the mask and the wafer relative to each other, using the mask scanning device and the wafer scanning device, so as to expose and transfer the pattern on the wafer, a detection device for detecting information regarding exposure before exposing and transferring the pattern onto the wafer by the illuminating device and for producing detection results, and a display for displaying exposure information obtained from the detection results. Also disclosed are methods of manufacturing semiconductor devices, for example, using such an exposure apparatus.
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Hasegawa Noriyasu
Kurosawa Hiroshi
Ozawa Kunitaka
Yoshimura Keiji
Canon Kabushiki Kaisha
Metjahic Safet
Nguyen Hung Henry
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