Exposure apparatus

Details Exposure apparatus Exposure apparatus

1988-04-05

1989-09-05

Hayes, Monroe H.

Photocopying

Projection printing and copying cameras

Step and repeat

355 74, G03B 2742

Patent

active

048643602

ABSTRACT:
An apparatus for photolithographically transferring, onto a plate-like member a pattern corresponding to picture elements of a liquid crystal display device and a pattern corresponding to driving circuits and so on, by use of a photomask. The surface of the plate-like member is divided into different areas and, each time one of the different areas of the plate-like member is subjected to the pattern transfer operation, the plate-like member is fed stepwise relative to an optical system provided to project an image of the photomask onto the plate-like member. At the same time, the range of the photomask pattern which is to be transferred onto the plate-like member is changed. By this, a portion of the picture-element pattern and a portion of the circuit pattern are transferred onto each of the different areas on the plate-like member, whereby a large-size pattern contributable to form a large-size display picture plane and a pattern contributable to form a control circuit for controlling the picture plane are transferred on the plate-like member.

REFERENCES:
patent: 4068948 (1978-01-01), Ritzerfeld
patent: 4128331 (1978-12-01), Nakamura et al.
patent: 4530587 (1985-07-01), Kosugi et al.
patent: 4589769 (1986-05-01), Matsuki
"Lithography for Flat Video Displays", Solid State Technology, Feb. 1988.

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