Hazardous or toxic waste destruction or containment – Processes for making harmful chemical substances harmless,... – By heating to effect chemical change. e.g. – pyrolysis
Reexamination Certificate
2007-05-01
2007-05-01
Padgett, Marianne (Department: 1762)
Hazardous or toxic waste destruction or containment
Processes for making harmful chemical substances harmless,...
By heating to effect chemical change. e.g., pyrolysis
C427S569000, C427S562000, C134S001000, C216S067000, C118S7230AN, C118S7230ER, C118S7230IR
Reexamination Certificate
active
09822191
ABSTRACT:
A chemical-reaction inducing means is provided in an exhaust line connecting a processing space for subjecting a substrate or a film to plasma processing to an exhaust means, and at least either an unreacted gas or byproduct exhausted from the processing space are caused to chemically react without allowing plasma in the processing space to reach the chemical-reaction inducing means, thereby improving the processing ability of the chemical-reaction inducing means to process the unreacted gas or byproduct.
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Hori Tadashi
Kanai Masahiro
Koda Yuzo
Moriyama Koichiro
Okabe Shotaro
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