4. Active solid-state devices (e.g., transistors, solid-state diode
  5. Non-single crystal, or recrystallized, semiconductor...
  6. Amorphous semiconductor material

Yuzo Koda

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Apparatus and method for forming a deposited film by a means...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Apparatus and method for forming a deposited film on a...

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – Amorphous semiconductor
Reexamination Certificate

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Apparatus and method for forming deposited film

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
Reexamination Certificate

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Apparatus and method for forming deposited film

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Apparatus for forming deposited film

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Profile ID: LFUS-PAI-P-392560

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