4. Electric heating
  5. Metal heating
  6. By arc

Koichiro Moriyama

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Apparatus and method for processing a substrate

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Apparatus and method for processing a substrate

Coating processes – Measuring – testing – or indicating
Reexamination Certificate

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Apparatus and method for processing a substrate

Coating apparatus – Gas or vapor deposition – Running length work
Reexamination Certificate

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Deposited-film forming process and deposited-film forming...

Coating processes – Coating by vapor – gas – or smoke – Moving the base
Reexamination Certificate

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Exhaust processing method, plasma processing method and...

Hazardous or toxic waste destruction or containment – Processes for making harmful chemical substances harmless,... – By heating to effect chemical change. e.g. – pyrolysis
Reexamination Certificate

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Profile ID: LFUS-PAI-P-905218

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