Exhaust processing apparatus

Details Exhaust processing apparatus Exhaust processing apparatus

1988-07-22

1990-07-10

McDowell, Robert

Metallurgical apparatus

With means treating or handling gases exhausted by treating...

By condensing and collecting a volatile constituent

55314, 55337, 55350, 118715, 118725, 266 89, 266148, 266157, 423 88, B01D 4600

Patent

active

049402137

ABSTRACT:
An exhaust processing apparatus comprises a cracking furnace for cracking and solidifying exhaust discharged from a reactor for forming crystals on a semiconductor substrate, a first collecting device for collecting relatively large components solidified in the cracking furnace, a second collecting device for collecting relatively small solidified components passed through the first collecting device, and a chemical or a physical adsorbing member for chemically or physically adsorbing the exhaust passed through the first and second collecting devices.
The apparatus may be provided with bypass piping for bypassing a particular section of the apparatus, a shutoff member for opening and closing the bypass piping and a control device for controlling the shutoff member.
The cracking furnace of the apparatus has a heating portion for heating the exhaust, an enlarged portion disposed downstream the heating portion and having a passage whose cross-sectional area is larger than that of the heating portion, and a cooling mechanism for forcibly cooling the heated exhaust.

REFERENCES:
patent: 3885932 (1975-05-01), Moore, Jr. et al.
patent: 4174372 (1979-11-01), Myzenkov et al.
patent: 4497780 (1985-02-01), Barin et al.
patent: 4804638 (1989-02-01), Hoke et al.
Posa, "A Thorough Fail-Safe System is Necessary in Equipment Using Hazardous Gas", Nikkei Microdevices, Aug., 1986, pp. 91-101.

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