Examining system for the particle-optical imaging of an...

Details Examining system for the particle-optical imaging of an... Examining system for the particle-optical imaging of an...

2005-06-07

2005-06-07

Nguyen, Kiet T. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

C250S310000

Reexamination Certificate

active

06903337

ABSTRACT:
An examining system for imaging an object positionable in an object plane, includes an illumination device for supplying energy to a delimited field of the object such that charged particles emerge from locations of the field, the field being displaceable in the plane of the object, a first deflector for providing a variable deflection field for guiding charged particles emerging from locations of a selectable region of the object through a fixed, predetermined beam cross-section, and a position-sensitive detector disposed in the beam path such that the charged particles, after having passed through the first deflector, impinge on the position-sensitive detector, wherein particles emerging from different locations of the region are imaged on different locations of the position-sensitive detector which are allocated to the locations of emergence.

REFERENCES:
patent: 4376249 (1983-03-01), Pfeiffer et al.
patent: 4740704 (1988-04-01), Rose et al.
patent: 4769543 (1988-09-01), Plies
patent: 4827127 (1989-05-01), Todokoro
patent: 4877326 (1989-10-01), Chadwick et al.
patent: 4912405 (1990-03-01), Richardson
patent: 4978855 (1990-12-01), Liebl et al.
patent: 5424541 (1995-06-01), Todokoro et al.
patent: 5545902 (1996-08-01), Pfeiffer et al.
patent: 5576833 (1996-11-01), Miyoshi et al.
patent: 5578821 (1996-11-01), Meisberger et al.
patent: 5616920 (1997-04-01), Plies
patent: 5757010 (1998-05-01), Langner
patent: 5973323 (1999-10-01), Adler et al.
patent: 6002128 (1999-12-01), Hill et al.
patent: 6067164 (2000-05-01), Onoguchi et al.
patent: 6087046 (2000-07-01), Nakasuji
patent: 6087659 (2000-07-01), Adler et al.
patent: 6087667 (2000-07-01), Nakasuji et al.
patent: 6107637 (2000-08-01), Watanabe et al.
patent: 6110626 (2000-08-01), Nakasuji
patent: 6110627 (2000-08-01), Nakasuji
patent: 6114709 (2000-09-01), Nakasuji
patent: 6117600 (2000-09-01), Nakasuji
patent: 6124596 (2000-09-01), Nakasuji et al.
patent: 6125522 (2000-10-01), Nakasuji
patent: 6144037 (2000-11-01), Ryan et al.
patent: 6153340 (2000-11-01), Nakasuji
patent: 6162581 (2000-12-01), Nakasuji et al.
patent: 6172363 (2001-01-01), Shinada et al.
patent: 6184526 (2001-02-01), Kohama et al.
patent: 6194102 (2001-02-01), Nakasuji et al.
patent: 6218664 (2001-04-01), Krans et al.
patent: 6218676 (2001-04-01), Nakasuji
patent: 6235450 (2001-05-01), Nakasuji
patent: 6259094 (2001-07-01), Nagai et al.
patent: 6265719 (2001-07-01), Yamazaki et al.
patent: 6284415 (2001-09-01), Nakasuji
patent: 6300023 (2001-10-01), Nakasuji
patent: 6307209 (2001-10-01), Nakasuji et al.
patent: 6326633 (2001-12-01), Nakasuji
patent: 6337164 (2002-01-01), Nakasuji
patent: 6352799 (2002-03-01), Nakasuji
patent: 6388261 (2002-05-01), Nakasuji
patent: 6414319 (2002-07-01), Spehr
patent: 6479819 (2002-11-01), Hamashima et al.
patent: 2001/0008274 (2001-07-01), Nakasuji
patent: 2001/0025932 (2001-10-01), Nakasuji
patent: 2001/0026929 (2001-10-01), Nakasuji
patent: 2002/0028399 (2002-03-01), Nakasuji et al.
patent: 2002/0033449 (2002-03-01), Nakasuji et al.
patent: 2002/0036264 (2002-03-01), Nakasuji et al.
patent: 2002/0084422 (2002-05-01), Klenzie et al.
patent: 27 33 966 (1980-05-01), None
patent: 39 04 032 (1993-07-01), None
patent: 196 34 456 (1998-03-01), None
patent: 199 44 857 (2001-03-01), None
patent: 100 44 199 (2002-06-01), None
patent: 0 218 920 (1994-01-01), None
patent: 1 045 425 (2000-10-01), None
patent: 1 117 125 (2001-07-01), None
patent: 11-132975 (1999-05-01), None
patent: 11-148905 (1999-06-01), None
patent: 11-162384 (1999-06-01), None
patent: 2002-164011 (2002-06-01), None
patent: WO 99/09582 (1999-02-01), None
patent: WO 00/19482 (2000-04-01), None
patent: WO 01/22469 (2001-03-01), None
H. Ohiwa, “Design of electron-beam scanning systems using the moving objective lens”, J. Vac. Sci. Technol., 15(3), May/Jun. 1978, pp. 849-852.
G. Kerkhoff et al., “New lens design with an extremely wide scanning area in one direction”, Licht—Und Teilchenoptik, Institut für angewandle Physik, Annual Report 1996/1997, pp. 112-113.
Goto, et al., “MOL (moving objective lens) Formulation of Deflective Aberration Free System”, Optik 48, No. 3, 1977, pp. 255-270.
X. Zhu et al., “Comprehensive Analysis of Electron Optical Design of SCALPEL-HT/Alpha”, Proc. SPIE, vol. 3997, pp. 170-183, Jul., 2000, Emerging Lithographic Technologies IV, Elizabeth A. Doblisz; Ed.

Affiliated with

Also associated with

Rating

Examining system for the particle-optical imaging of an... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Examining system for the particle-optical imaging of an..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Examining system for the particle-optical imaging of an... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3518474