Etching of contact holes

Details Etching of contact holes Etching of contact holes

1997-03-31

2000-02-15

Duda, Kathleen

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making electrical device

430317, 216 18, G03F 726

Patent

active

060251166

ABSTRACT:
The photolithographic etching of contact holes in trenches in an insulator layer over a silicon body is improved by adjusting properly the depth of the trench and the thickness of the photoresist used in the photolithography.

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