Etching agent for III/V semiconductors

Details Etching agent for III/V semiconductors Etching agent for III/V semiconductors

1977-04-06

1978-07-11

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156645, 156662, 156903, 252 793, H01L 21306

Patent

active

041000145

ABSTRACT:
An etching agent for III/V semiconductor material consisting of

REFERENCES:
Compound Semiconductors, vol. 1, Preparation of III-V Compounds, Rheinhold, 963, pp. 445-468, Etching of the III-V Intermetallic Compounds by J. W. Faust, Jr.

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