Environmental cell for a scanning probe microscope

Details Environmental cell for a scanning probe microscope Environmental cell for a scanning probe microscope

2007-08-07

2007-08-07

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Positive ion probe or microscope type

C250S306000, C250S297000, C250S442110, C073S105000

Reexamination Certificate

active

10931059

ABSTRACT:
An environmental cell for use with a scanning probe microscope includes a cell chamber, a probe mounted to the cell chamber, a puck selectively connected to the cell chamber, a sample holder selectively inserted in the puck, and a translation mechanism coupled to the sample holder to move the sample holder. Gasses or liquids may be introduced to the environmental cell through channels formed in either the puck, sample holder, or cell chamber.

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patent: 2004/0083799 (2004-05-01), Markakis et al.
patent: 2005/0001164 (2005-01-01), Tokuda et al.

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