Enhancement of eddy current based measurement capabilities

Details Enhancement of eddy current based measurement capabilities Enhancement of eddy current based measurement capabilities

2006-08-01

2006-08-01

LeDynh, Bot (Department: 2862)

Electricity: measuring and testing

Magnetic

With means to create magnetic field to test material

C324S231000

Reexamination Certificate

active

07084621

ABSTRACT:
A method and an apparatus for enhancement of the for measuring resistance-based features of a substrate is provided. The apparatus includes a sensor configured to detect a signal produced by a eddy current generated electromagnetic field. The magnetic field enhancing source is positioned to the alternative side of the object under measurement relative to the sensor to enable the sensitivity enhancing action. The sensitivity enhancing source increases the intensity of the eddy current generated in the object under measurement, and as a result the sensitivity of the sensor. A system enabled to determine a thickness of a layer and a method for determining a resistance-based feature characteristic are also provided.

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