Enhanced optical detection of minimum features using depolarizat

Details Enhanced optical detection of minimum features using depolarizat Enhanced optical detection of minimum features using depolarizat

1998-09-23

2000-02-01

Font, Frank G.

Optics: measuring and testing

By polarized light examination

Of surface reflection

356237, G01J 400, G01N 2100

Patent

active

060209666

ABSTRACT:
Optical measurement of image shortening on a lithographically formed minimum feature is enhanced using crossed-polarizer imaging. The minimum feature, which is comprised of a nested array of lines having a width and space corresponding to the critical dimension of interest, is caused to maintain a preferred optical polarization axis due to the repeating nature of the nested pattern. The preferred optical polarization axis causes the transfer of some of the linearly polarized illumination into a new polarization orientation which is sympathetic with a crossed polarizer located in the detection channel of the optical imaging system. The crossed polarizer then allows the light reflected from the nested feature to pass to a detector, while extraneous (background) light is rejected. This results in a high contrast image of the nested feature that facilitates the determination of width, and that reduces measurement variability as a function of the optical properties of the nested feature.

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