4. Optics: measuring and testing
  5. By polarized light examination
  6. Of surface reflection

Christopher J. Progler

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Alternating aperture phase shift photomask having light...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Alternating aperture phase shift photomask having light...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Reexamination Certificate

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Apparatus and method for inspection of photolithographic mask

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Binary half tone photomasks and microscopic...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Binary half tone photomasks and microscopic...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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