Energy sensitive materials and methods for their use

Details Energy sensitive materials and methods for their use Energy sensitive materials and methods for their use

1992-04-29

1995-08-08

Michl, Paul R.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Electron beam imaging

430270, 430311, 430313, 430323, 430325, 430326, 430330, G03C 500

Patent

active

054397804

ABSTRACT:
A class of silicon-containing materials display excellent sensitivity in the ultraviolet and deep ultraviolet for the formation of patterns by radiation induced conversion into glassy compounds. Materials are depositable from the vapor phase and show excellent promise for use such as resists in the fabrication of electronic and optical devices.

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