Energy filter for cold field emission electron beam apparatus

Details Energy filter for cold field emission electron beam apparatus Energy filter for cold field emission electron beam apparatus

2011-04-05

2011-04-05

Nguyen, Kiet T (Department: 2881)

Radiant energy

Electron energy analysis

C250S310000, C250S3960ML

Reexamination Certificate

active

07919749

ABSTRACT:
An electron beam apparatus and a method for providing an energy-filtered primary electron beam are described. Therein, a primary electron beam having an asymmetric first energy distribution is generated by means of an electron source. The primary electron beam is high-pass energy filtered using a retarding lens.

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