Electrolysis: processes – compositions used therein – and methods – Electrolytic erosion of a workpiece for shape or surface... – With measuring – testing – or sensing
Reexamination Certificate
2005-01-04
2005-01-04
Ryan, Patrick (Department: 1745)
Electrolysis: processes, compositions used therein, and methods
Electrolytic erosion of a workpiece for shape or surface...
With measuring, testing, or sensing
C204S22400M
Reexamination Certificate
active
06837983
ABSTRACT:
Systems and methods for detecting the endpoint of a polishing step. In general, an electropolishing system is provided with a power supply configured to deliver a current through an electrolytic solution. Signal characteristics of the signal provided by the power supply are monitored to determine a polishing endpoint. Illustratively, the monitored signal characteristics include current and voltage.
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Chen Liang-Yuh
Duboust Alain
Neo Siew
Wang Yan
Applied Materials Inc.
Moser Patterson & Sheridan
Parsons Thomas H.
Ryan Patrick
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