Endpoint detection for electro chemical mechanical polishing...

Electrolysis: processes – compositions used therein – and methods – Electrolytic erosion of a workpiece for shape or surface... – With measuring – testing – or sensing

Reexamination Certificate

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Other Related Categories

C204S22400M

Type

Reexamination Certificate

Status

active

Patent number

06837983

Description

ABSTRACT:
Systems and methods for detecting the endpoint of a polishing step. In general, an electropolishing system is provided with a power supply configured to deliver a current through an electrolytic solution. Signal characteristics of the signal provided by the power supply are monitored to determine a polishing endpoint. Illustratively, the monitored signal characteristics include current and voltage.

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