Endpoint detection for electro chemical mechanical polishing...

Details Endpoint detection for electro chemical mechanical polishing... Endpoint detection for electro chemical mechanical polishing...

2005-01-04

2005-01-04

Ryan, Patrick (Department: 1745)

Electrolysis: processes, compositions used therein, and methods

Electrolytic erosion of a workpiece for shape or surface...

With measuring, testing, or sensing

C204S22400M

Reexamination Certificate

active

06837983

ABSTRACT:
Systems and methods for detecting the endpoint of a polishing step. In general, an electropolishing system is provided with a power supply configured to deliver a current through an electrolytic solution. Signal characteristics of the signal provided by the power supply are monitored to determine a polishing endpoint. Illustratively, the monitored signal characteristics include current and voltage.

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