Optics: measuring and testing – By polarized light examination – Of surface reflection
Reexamination Certificate
2008-12-08
2011-11-15
Toatley, Gregory J (Department: 2877)
Optics: measuring and testing
By polarized light examination
Of surface reflection
C356S364000
Reexamination Certificate
active
08059276
ABSTRACT:
System for, and method of ellipsometric investigation of and analysis of samples which have, for instance, a non-random effectively “regular” textured surface, and/or a surface characterized by an irregular array of faceted structures.
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PCT Publication WO 99/45340.
Published Application US 2002/0024668 by Stehle et al.
He Ping
Hilfiker James N.
Liphardt Martin M.
Sun Jianing
J.A. Woollam Co., Inc
Toatley Gregory J
Valentin Juan D
Welch James D.
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