Elevated emitter for double poly BICMOS devices

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

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257377, 257466, 257571, 257580, 257586, 257588, 257592, 257656, 257754, 437 33, 437 34, 437 63, 437105, 437174, 437186, 437203, H01L 2976, H01L 21265

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active

055571310

ABSTRACT:
A monolithic semiconductor device includes a field effect transistor and a bipolar junction transistor with an elevated emitter structure. An elevation structure raises the BJT emitter above the plane of the base. The elevation structure increases travel distance between a heavily doped base contact region and the emitter and protects against encroachment without increasing the total surface area allocated to the BJT device. A spacer oxide separates the polysilicon base contact and the elevation structure.

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