Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
Reexamination Certificate
2006-07-25
2006-07-25
Tran, Thuy Vinh (Department: 2821)
Electric lamp and discharge devices: systems
Discharge device load with fluent material supply to the...
Plasma generating
C118S7230MA
Reexamination Certificate
active
07081710
ABSTRACT:
An elementary plasma source for generating plasma is provided. In the elementary plasma source, first and second magnets are shaped like a hollow cylinder, and the second magnet surrounds the first magnet, for forming a magnetic trap between the first and second magnets. A guide provides microwaves to a space between the first and second magnets.
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Hur Ji-Hyun
Kim Seong-Gu
Oh Jae-Joon
Petrin Andrei-B.
Shin Jai-Kwang
Dilworth & Barrese LLP
Tran Thuy Vinh
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