Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
Patent
1987-03-09
1988-11-15
Fields, Carolyn E.
Radiant energy
Inspection of solids or liquids by charged particles
Positive ion probe or microscope type
250292, 250305, 250306, H01J 4900
Patent
active
047851732
ABSTRACT:
An element analyzing apparatus includes a secondary ion excitation source such as an ion gun, an ion optical system such as an imaging type energy filter and a mass spectrometer. A quadrupole mass spectrometer is used as the spectrometer. The quadrupole mass spectrometer has a construction in relation to (L.times.F).sup.2 >0.2, where L (meter) is a length of a quadrupole of the spectrometer and F (MHz) is frequency. Secondary ions emitted from a sample are accelerated to cause them to pass through the ion optical system and the quadrupole mass spectrometer under a condition with an energy more than a secondary ion energy constant in addition to an energy of the secondary ions emitting from the sample. The first mentioned energy may be ten times or twenty times the secondary ion energy constant. The element analyzing apparatus is capable of effecting the elementary analysis with high sensitivity and accuracy without lowering space resolution.
REFERENCES:
patent: 4132892 (1979-01-01), Wittmaack
patent: 4652753 (1987-03-01), Shiokawa
"Energetic Ion Mass Analysis Using a Radio-Frequency Quadrupole Filter", Rev. Sci. Instrum. 49(6), Jun. 1978, pp. 698-706.
Wittmaack, "Improved Secondary-Ion Extraction in a Quadrupole-Based Ion Microprobe," International Journal of Mass Spectrometry and Ion Physics, 43, (1982), 31-39.
G. Slodzian, "Looking at the Collection Efficiency Problem Through the Ion Microscope Optics," NBS Spec. Publ. 427, Workshop on Secondary Ion Mass Spectrometry (SIMS) and Ion Microprobe Mass Analysis Held at NBS, Gaithersburg, Md., Sep. 16-18, 1974, (Issued Oct., 1975).
Pavlyak, et al., "Detection of Hydrogen in Metals by the SIMS-Method with Quadrupole Mass Filter," Japanese Journal of Applied Physics, vol. 16, No. 2, Feb. 1977, pp. 335-342.
Anelva Corporation
Fields Carolyn E.
Miller John A.
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