Electrostatic repulsion ion microscope

Details Electrostatic repulsion ion microscope Electrostatic repulsion ion microscope

1996-04-03

1997-02-11

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Positive ion probe or microscope type

250306, H01J 4946

Patent

active

056023901

ABSTRACT:
The ion microscope for imaging the surface structure of objects uses an electrostatic lens to direct an incident beam of positive ions generated from ion source toward an electrostatic center of a convex end of an object mounting electrode in a direction which provides for near normal incidence to the surface of the object mounting electrode. The object mounting electrode has an electrical potential relative to that of the ion source sufficient to repel ions upon their close approach to its surface. The electrostatic lens focuses repelled ions upon an ion detector to form an image of the surface of the object mounting electrode and of the objects mounted thereon. A magnetic field is used to separate the ion beams formed by the incident and repelled positive ions to permit location of the detector out of the path of the incident beam obtaining near normal incidence of the illuminating ion beam to the surface of the object mounting electrode.

REFERENCES:
patent: 2548870 (1951-04-01), Colterjohn, Jr.
patent: 4866272 (1989-04-01), Aoki

Affiliated with

Also associated with

Rating

Electrostatic repulsion ion microscope does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Electrostatic repulsion ion microscope, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Electrostatic repulsion ion microscope will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-344184