Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate
2008-01-01
2008-01-01
Vanore, David A. (Department: 2881)
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
C250S311000, C250S397000, C250S398000
Reexamination Certificate
active
07315029
ABSTRACT:
Embodiments of the present invention may be utilized to improve electron beam deflection. One embodiment provides an electrostatic deflection system with electrodes that minimize aberrations and to achieve vertical incidence simultaneously. By using at least two stages of deflection for a deflection direction, the present invention allows the deflected electron beam to pass a back focal plane of an objective lens while deflection capacitors are not disposed across the back focal plane. As a result, deflection electrodes can have an angle of 120° to minimize aberrations and simultaneously achieve vertical incidence of the electron beam on a target to avoid distortions or changes in magnification with height variations of the target or focus variations.
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DeVore William J.
Frosien Juergen
Pearce-Percy Henry
Winkler Dieter
Applied Materials Inc.
Patterson & Sheridan LLP
Vanore David A.
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