4. Radiant energy
  5. Inspection of solids or liquids by charged particles
  6. Electron probe type

Henry Pearce-Percy

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Electron beam inspection system and method

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent

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Electron beam inspection system and method

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent

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Electrostatic deflection system with impedance matching for...

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate

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Electrostatic deflection system with low aberrations and...

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1098589

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