Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate
2007-06-05
2007-06-05
Berman, Jack I. (Department: 2881)
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
Reexamination Certificate
active
11241789
ABSTRACT:
An apparatus and method for deflecting electron beams with high precision and high throughput. At least one electrode of a deflecting capacitor is connected to a signal source via a coaxial cable. A termination resistor is further connected to the coaxial cable and the electrode at the joint of the coaxial cable and the electrode. The termination resistor has a resistance matched to the impedance of the coaxial cable and the electrode has an impedance matched to half of the impedance of the coaxial. The deflecting capacitors of the present invention have a minimized loss of precision due to eddy current. The spacing of electrodes in the deflecting capacitors is reduced by a factor of approximately two compared to the state-the-art system.
REFERENCES:
patent: 4434371 (1984-02-01), Knauer
patent: 4922196 (1990-05-01), Rigg
patent: 5208560 (1993-05-01), Yasutake
patent: 2003/0089858 (2003-05-01), Hotta et al.
Buller Benyamin
Devore William J.
Frosien Juergen
Mirro, Jr. Eugene
Pearce-Percy Henry
Applied Materials Inc.
Berman Jack I.
Patterson & Sheridan
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