Electrostatic chuck with improved spacing mask and workpiece det

Details Electrostatic chuck with improved spacing mask and workpiece det Electrostatic chuck with improved spacing mask and workpiece det

1997-11-14

1999-03-16

Davis, Antoine Duval

Machines not elsewhere specified

Material working, abrading, or founding machinery

Element or attachment

1509

Patent

active

D04068521

REFERENCES:
patent: 5671116 (1997-09-01), Husain
patent: 5691876 (1997-11-01), Chen et al.
patent: 5745332 (1998-04-01), Burkhart et al.

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