Electrostatic chuck with improved spacing and charge migration r

Details Electrostatic chuck with improved spacing and charge migration r Electrostatic chuck with improved spacing and charge migration r

1997-12-24

2000-02-01

Davis, Antoine Duval

Machines not elsewhere specified

Material working, abrading, or founding machinery

Element or attachment

1509

Patent

active

D04200225

REFERENCES:
patent: 5528451 (1996-06-01), Su

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