Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate
2006-01-31
2006-01-31
Reichard, Dean A. (Department: 2831)
Electricity: electrical systems and devices
Electric charge generating or conducting means
Use of forces of electric charge or field
C361S230000, C361S233000, C269S008000, C269S903000, C279S128000, C118S724000
Reexamination Certificate
active
06992876
ABSTRACT:
An electrostatic chuck for preventing warpage of a ceramic layer and cooling gas leakage while providing enhanced electrostatic attraction and an improved detachment performance and its manufacturing method is disclosed. The chuck comprises at least one electrode (90, 91, 92) located in the middle of the ceramic layer (80) in its thickness direction, a cooling gas channel (81) is formed on a surface of the ceramic layer within an outer edge of the electrode and above the electrode, wherein the electrode extends beyond the cooling gas channel. Preferably the electrodes are shaped in the form of two interlocked structures comprising multiple interconnected C-shaped ring portion (91c, 92c).
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Nakajima Shu
Tanaka Yasushi
Harris Anton
Lam Research Corporation
Martine & Penilla & Gencarella LLP
Reichard Dean A.
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