Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent
1993-03-01
1995-01-24
Gaffin, Jeffrey A.
Electricity: electrical systems and devices
Electric charge generating or conducting means
Use of forces of electric charge or field
279128, H02N 1300
Patent
active
053846818
ABSTRACT:
An electrostatic chuck having an insulating layer comprising solid-solution grains comprised of alumina and a transition metal oxide having the structure of a corundum, and a glass component present in grain boundaries of the solid-solution grains. The transition metal oxide is a transition metal oxide capable of forming a solid solution with alumina, and preferably includes chromia (Cr.sub.2 O.sub.3), whose crystal structure is similar to alumina, having the structure of a corundum. The electrostatic chuck can exhibit a stable electrostatic performance without regard to operating temperatures.
REFERENCES:
patent: 3875119 (1975-04-01), Aoki et al.
patent: 4020234 (1977-04-01), Gardner
patent: 4040827 (1977-08-01), Hamaker et al.
patent: 4109377 (1978-08-01), Blazick et al.
patent: 4292261 (1981-09-01), Kotani et al.
patent: 4384918 (1983-05-01), Abe
patent: 4480284 (1984-10-01), Tojo et al.
patent: 4502094 (1985-02-01), Lewin et al.
patent: 4554611 (1985-11-01), Lewin
patent: 4591574 (1986-05-01), Ando et al.
patent: 4645218 (1987-02-01), Ooshio et al.
patent: 4652318 (1987-03-01), Masuda et al.
patent: 4668644 (1987-05-01), Filhol
patent: 4678683 (1987-07-01), Pasco et al.
patent: 4692836 (1987-09-01), Suzuki
patent: 4724510 (1988-02-01), Wicker et al.
patent: 4735926 (1988-04-01), Ando et al.
patent: 5104834 (1992-04-01), Watanabe et al.
patent: 5151845 (1992-09-01), Watanabe et al.
Chemical Abstract, vol. 92, No. 6, Feb. 1980, p. 270, (Corresponding to JP-A-79 32,450, item 92:4627U.
Kitabayashi Tetsuo
Watanabe Toshiya
Burt Pamela S.
Carrier Joseph P.
Gaffin Jeffrey A.
Toto Ltd.
Weiner Irving M.
LandOfFree
Electrostatic chuck does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Electrostatic chuck, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Electrostatic chuck will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1471847