Chemistry: electrical and wave energy – Apparatus – Electrolytic
Reexamination Certificate
2005-10-04
2005-10-04
King, Roy (Department: 1742)
Chemistry: electrical and wave energy
Apparatus
Electrolytic
C204S22400M
Reexamination Certificate
active
06951599
ABSTRACT:
Embodiments of the present invention generally relate to a method and apparatus for planarizing a substrate by electropolishing techniques. Certain embodiments of an electropolishing apparatus include a contact ring adapted to support a substrate, a cell body adapted to hold an electropolishing solution, a fluid supply system adapted to provide the electropolishing solution to the cell body, a cathode disposed within the cell body, a power supply system in electrical communication with the contact ring and the cathode, and a controller coupled to at least the fluid supply system and the power supply system. The controller may be adapted to provide a first set of electropolishing conditions to form a boundary layer between the substrate and the electropolishing solution to an initial thickness and may be adapted to provide a second set of electropolishing conditions to control the boundary layer to a subsequent thickness less than or equal to the initial thickness.
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Dixit Girish A.
Gandikota Srinivas
Padhi Deenesh
Yahalom Joseph
Applied Materials Inc.
King Roy
Moser Patterson & Sheridan
Wilkins, III Harry D.
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