Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate
2011-04-19
2011-04-19
Landau, Matthew C (Department: 2813)
Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
C438S108000, C438S618000, C438S640000, C257SE21575
Reexamination Certificate
active
07928001
ABSTRACT:
The electronic device includes a first interconnect layer and a second interconnect layer. The second interconnect layer is provided on the lower surface of the first interconnect layer. The first interconnect layer includes a via plug (first conductive plug). An end face of the via plug on the side of the second interconnect layer is smaller in area than the opposite end face. The via plug is exposed on the surface of the first interconnect layer facing the second interconnect layer. An insulating resin forming the first interconnect layer is higher in thermal decomposition temperature than an insulating resin forming the second interconnect layer.
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Semiconductor Glossary, Interconnect Definition, http://www.semi1source.com/glossary/default.asp?searchterm=interconnect.
Translation of Chinese Office action for Chinese Document No. 20070149970.8.
Chinese Patent Office issued a Chinese Office Action dated Jul. 31, 2009, Application No. 200710149970.8.
Kawano Masaya
Kurita Yoichiro
Soejima Koji
Landau Matthew C
Nicely Joseph C
Renesas Electronics Corporation
Young & Thompson
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