Electron microscopes

Details Electron microscopes Electron microscopes

1977-03-07

1978-09-26

Dixon, Harold A.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

250399, G01M 2300

Patent

active

041173236

ABSTRACT:
Cathodoluminescence is detected either in the transmitted or emitted mode in a scanning electron microscope by means of a photodiode mounted to the specimen base in the sample stage of the system, thereby permitting a broader spectral response. Preferably, the photodiode is mounted together with its feedback amplifier resistor and capacitor in a metallic housing secured to the sample base beneath the sample (in the transmitted mode) or above and to the side of the sample (in the emitted mode). The response signal is thus coupled from the vacuum chamber in electrical, not optical form.

REFERENCES:
patent: 3418473 (1968-12-01), Blue
patent: 3558885 (1971-01-01), Fleming
patent: 3812288 (1974-05-01), Walsh et al.
patent: 3864722 (1975-02-01), Carnes
patent: 4048502 (1977-09-01), Gudden
"Scanning Electron Microscope," Japan Electronic Engineering, Nov. 1970, No. 48, pp. 66-70.

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