Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Patent
1992-10-23
1994-11-22
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
Analyte supports
25044211, H01J 3720
Patent
active
053671716
ABSTRACT:
A specimen cartridge fashioned of a good thermal conductor, with an outer frame being fashioned of heat insulating material, and with a connecting rod being fashioned of a poor thermal conductor. A temperature distribution of the specimen is uniform and a temperature drift is reduced, with a thermal expansion of a specimen cartridge tilting rod not affecting the tilting angle, thereby making it possible to perform various highly accurate observations and measurements with an electron microscope.
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8056 Journal of Physics E. Scientific Instruments vol. L5 (1982) Feb. No. 2, Dorking, Great Britian.
Aoyama Takashi
Hosoi Kishu
Isakozawa Shigeto
Kimoto Koji
Misawa Yutaka
Anderson Bruce C.
Hitachi , Ltd.
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