Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Patent
1994-06-20
1995-09-26
Berman, Jack I.
Radiant energy
Inspection of solids or liquids by charged particles
Electron microscope type
25044211, H01J 3726
Patent
active
054536170
ABSTRACT:
A composition change and a 3-dimensional strained structure in an interface or thin film of a layered thin film specimen are detected with a resolution of atom order and quantitatively analyzed. An accelerated electron beam is impinged upon a specimen cleaved in a wedge form. An equal thickness fringe appearing on a transmitted image is detected. By utilizing such a phenomenon that the distance t of the equal thickness fringe is changed by a lattice plane inclination, angle distribution of lattice plane inclination is measured. An analysis of the strained structure is made. Furthermore, processing is conducted so that the equal thickness fringe may represent only the composition change, and a quantitative analysis of the composition distribution is also made. By estimating the composition change and strained structure in the heterointerface and thin film with a resolution of atom order, relations between characteristics and the composition change and strained structure of a strained superlattice device or the like can be elucidated. Thus, not only defective analysis can be made, but also information concerning optimization of the process condition and device structure is obtained.
REFERENCES:
patent: 4146788 (1979-03-01), Mirkin et al.
Japanese Journal of Applied Physics, vol. 26, No. 5, May 1987, Kakibayashi et al., pp. 770-771. "Observation of Fine Compositional Fluctuation in GaAs/ACx Ga.sub.1-x as Superstructure using Composition Analysis by Thickness Fringe (CAT) Method".
Japanese Journal of Applied Physics, vol. 30, No. 1A, Jan. 1991, Kakibayashi et al., pp. L52-L55. "Direct Observation of Stain Distribution in InP/In.sub.1-x, Ga.sub.x P Heterointerfaces by the Compositional Analysis by Thickness Fringe Method".
Japanese Journal of Applied Physics, vol. 25, No. 11, Nov., 1986, Kakibayashi et al., pp. 1644-1649. "Limitation Studies of a Composition Analysis by Thickness Fringe (CAT) in an Electron Microscope Image of GaAs/Al.sub.x Ga.sub.1-x as Superstructure".
N. Tanaka et al., "Detection of Strain in InP/InGaP Superlattices by Dark-Field Electron Microscopy and Nano-Diffraction Technique", Japanese Journal of Applied Physics, vol. 30, No. 6A, Jun. 1991, pp. L959-L962.
Kakibayashi Hiroshi
Tsuneta Ruriko
Berman Jack I.
Hitachi , Ltd.
Nguyen Kiet T.
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