Electron microscope (comprising an auxiliary lens)

Details Electron microscope (comprising an auxiliary lens) Electron microscope (comprising an auxiliary lens)

1978-05-25

1981-12-15

Dixon, Harold A.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

250396ML, G01M 2300

Patent

active

043061494

ABSTRACT:
A switchable auxiliary lens is arranged in the vicinity of the objective lens of an electron microscope to enable switching between TEM mode and STEM mode. The auxiliary lens may be formed by an interruption in the magnetic circuit of one of the poles of the main lens, and may include an electromagnetic coil which can be excited in a reversable manner.

REFERENCES:
patent: 3748467 (1973-07-01), Suganuma
patent: 3795809 (1974-03-01), Takashima
patent: 3872305 (1975-03-01), Kolke

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