Electron microscope

Details Electron microscope Electron microscope

1997-08-20

1998-09-22

Nguyen, Kiet T.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

25044111, H01J 3718

Patent

active

058118039

ABSTRACT:
An electron microscope comprises: a electron optical column 5 for allowing an electron beam aligned and focused by a lens 2, 3, 4 to pass therethrough; a specimen chamber 8 for receiving therein a sample 7 which is irradiated with the electron beam passing through the electron optical column; and a separating thin film 6, mounted so as to close an opening of the electron optical column on the side of the specimen chamber, for separating the electron optical column from the specimen chamber in a vacuum level.

REFERENCES:
patent: 3963922 (1976-06-01), Zulliger et al.

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