Radiant energy – Inspection of solids or liquids by charged particles
Patent
1989-07-18
1991-07-02
Berman, Jack I.
Radiant energy
Inspection of solids or liquids by charged particles
250307, 250310, 250396R, 250396ML, G21K 108
Patent
active
050292498
ABSTRACT:
An electron microscope eliminates external ducting for evacuation by interlinking the interiors of a sample chamber for a sample, a casing for electron lenses and a chamber for an electron gun. Those interiors form a closed space with an evacuation path extending therethrough and are evacuated by evacuation means a vacuum pump connected to the sample chamber. The electron lenses are contained within sealed modules and the evacuation path passes between the sides of those modules and the internal walls of the casing. The resulting structure may be enclosed in substantially unbroken magnetic shielding.
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Berman Jack I.
Hitachi , Ltd.
Nguyen Kiet T.
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