Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Patent
1981-07-28
1984-02-28
Smith, Alfred E.
Radiant energy
Inspection of solids or liquids by charged particles
Electron microscope type
H01J 3709, H01J 3726
Patent
active
044343671
ABSTRACT:
An electron microscope comprises an objective lens, at least an intermediate lens and a projector lens arrayed in this order on an optical axis. A movable aperture element is disposed between the objective lens and the intermediate lens whose disposition and magnetic excitation are so selected that electron beam diverging from a crossover produced at a back focal plane of the objective lens is focused on a plane of the movable aperture element. In the case of an electron microscope comprising an objective lens, an objective aperture element, a selected area aperture element, at least an intermediate lens and a projector lens arrayed in this order along an optical axis, an additional lens is disposed between the objective aperture element and the selected area aperture element. Disposition and magnetic excitation of the additional lens are so selected that electron beam diverging from a crossover produced at a back focal plane of the objective lens is focused at a plane of the selected area aperture element. In both electron microscopes, divergence angle of the electron beam scattered by a specimen is restricted by the movable aperture element or the selected area aperture element.
REFERENCES:
patent: 3795809 (1974-03-01), Takashima
patent: 3852597 (1974-12-01), Yanaka et al.
patent: 4121100 (1978-10-01), Kubozoe et al.
patent: 4246487 (1981-01-01), Anger et al.
Berman Jack I.
International Precision Incorporated
Smith Alfred E.
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