Electron microscope

Details Electron microscope Electron microscope

1997-07-24

1999-04-27

Nguyen, Kiet T.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

2504431, H01J 3720

Patent

active

058981772

ABSTRACT:
A method of operating an electron microscope under a high temperature and the electron microscope are provided. The electron microscope can stably set and efficiently heat a sample to observe and measure high temperature physical properties such as phase transformation, phase transition and the like required for development of a heat resistant material. In the method of operating the electron microscope and the electron microscope, a sample to be observed is set so as to position at a central hole of a double spiral flat filament, the detachable heating stage is fixed to the heating holder using screws of a pivot, and the heating stage is tilted by vertical movement of a crank-shaped arm. The heating stage and the arm are insulated from each other by an insulating body, and current from a power source is conducted by a conductor wire to heat the filament.

REFERENCES:
patent: 3896314 (1975-07-01), Nukui et al.
patent: 4789781 (1988-12-01), Kitagawa et al.
patent: 5091651 (1992-02-01), Hokke
patent: 5296669 (1994-03-01), Kobayashi et al.
patent: 5367171 (1994-11-01), Aoyama et al.

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