Electron gun, electron beam exposure apparatus, and exposure...

Details Electron gun, electron beam exposure apparatus, and exposure... Electron gun, electron beam exposure apparatus, and exposure...

2011-04-05

2011-04-05

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S306000, C250S307000, C250S3960ML, C250S492300, C315S111810, C313S414000, C313S413000

Reexamination Certificate

active

07919750

ABSTRACT:
An electron gun includes an electron source configured to emit electrons. The electron source includes an electron emission region configured to emit the electrons and an electron emission restrictive region configured to restrict emission of the electrons. The electron emission restrictive region is located on a side surface of the electron source except an electron emission surface on a tip of the electron source and is covered with a different material from the electron source. The electron gun emits thermal field-emitted electrons by applying an electric field to the tip while maintaining a sufficiently low temperature to avoid sublimation of a material of the electron source. The material of the electron source may be lanthanum hexaboride (LaB6) or cerium hexaboride (CeB6). The electron emission restrictive region may be covered with carbon.

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