Electron beam treatment apparatus

Details Electron beam treatment apparatus Electron beam treatment apparatus

2006-05-23

2006-05-23

Wells, Nikita (Department: 2881)

Radiant energy

Irradiation of objects or material

Ion or electron beam irradiation

C250S492230, C250S389000, C438S798000, C438S787000, C438S473000, C438S638000

Reexamination Certificate

active

07049612

ABSTRACT:
One embodiment of the present invention is an electron beam treatment apparatus that includes: (a) an array of lamps that output radiation; (b) a support mechanism adapted to support a substrate at a treatment position above the lamps; and (c) a lamp heat shield, disposed above the array, having a radiation absorption portion adapted to absorb radiation from at least a portion of the array, and a radiation reflection portion adapted to reflect radiation from at least a portion of the array towards the substrate when disposed at the treatment position.

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patent: 6831284 (2004-12-01), Demos et al.
patent: 2003/0038251 (2003-02-01), Livesay et al.
patent: 2004/0266123 (2004-12-01), Cui et al.
patent: WO 9636070 (1996-11-01), None

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