Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Electron beam imaging
Patent
1997-08-21
1999-11-16
Young, Christopher G.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Electron beam imaging
430311, G03C 500
Patent
active
059855169
ABSTRACT:
A method of preparing a surface for exposure to an electron beam includes forming a water soluble self-acid-doped conducting polyaniline material. The water soluble self-acid-doped conducting polyaniline material may be poly(aniline-co-N-propanesulfonic acid aniline). The polyaniline material may be mixed with polyvinyl alcohol and applied to a surface prior to subjecting the surface to an electron beam. The electron beam is then transmitted through the material and onto the surface, with the polyaniline material acting as a charge dissipation layer.
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F.Mizuno, et al."Application of a High-Throughput Electron-Beam System for 0.3 .mu.m Large Scale Intergration," J.Vac. Sci. Technol. B 12(6), Nov./Dec. 1994, pp. 3440-3443.
United Microelectronics Corp.
Young Christopher G.
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