Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent
1998-01-16
2000-03-14
Nguyen, Kiet T.
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
H01J 37244
Patent
active
060375892
ABSTRACT:
An high resolution electron beam observation instrument has an electron beam source, an electron beam optical system for converging the electron beam and scanning the electron beam across the surface of a sample, and a compound magnetic and electrostatic objective lens comprising a single pole magnetic lens having a single magnetic pole portion disposed between the electron beam source and the sample and an electrostatic immersion lens, the electrostatic immersion lens comprising an upper electrode and a lower electrode, one end of the upper electrode extending between the single magnetic pole portion and the sample, and the lower electrode being disposed between the upper electrode and the sample; wherein a deceleration electric field is generated between the upper electrode and the lower electrode to allow high resolution observation of the sample. The upper electrode may comprise the single magnetic pole portion of the single pole magnetic lens, or one or more seperate electrodes. The single pole magnetic lens has a conical shaped portion extending between the single magnetic pole portion and the electron beam source. A potential applied to the sample differs from a potential applied to the lower electrode when the sample is not inclined and a difference between the potentials of the sample and the lower electrode is reduced, or the potentials are made equal to each other when the sample is inclined by the sample inclining means.
REFERENCES:
patent: 5387793 (1995-02-01), Sato et al.
patent: 5668372 (1997-09-01), Iwabuchi et al.
patent: 5670782 (1997-09-01), Sato
patent: 5677530 (1997-10-01), Sato et al.
Sato Mitsuyoshi
Takaoka Osamu
Yonezawa Akira
Nguyen Kiet T.
Seiko Instruments Inc.
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