Radiant energy – Inspection of solids or liquids by charged particles
Reexamination Certificate
2007-07-24
2007-07-24
Wells, Nikita (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
C250S307000, C250S310000, C250S400000, C250S442110, C250S3960ML, C250S397000, C250S492200, C250S492300
Reexamination Certificate
active
10445826
ABSTRACT:
The present invention provides an electron beam apparatus for evaluating a sample surface, which has a primary electro-optical system for irradiating a sample with a primary electron beam, a detecting system, and a secondary electro-optical system for directing secondary electron beams emitted from the sample surface by the irradiation of the primary electron beam to the detecting system.
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Hamashima Muneki
Karimata Tsutomu
Kihara Naoto
Kimba Toshifumi
Murakami Takeshi
Ebara Corporation
Wells Nikita
Westerman Hattori Daniels & Adrian LLP
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