Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2006-02-14
2006-02-14
Lee, John R. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
C250S306000, C250S307000, C250S311000, C250S492100, C250S492200, C250S3960ML, C250S3960ML, C250S398000, C250S427000, C438S014000, C315S111810, C324S537000, C324S750010, C324S754120
Reexamination Certificate
active
06998611
ABSTRACT:
An electron beam apparatus is provided for reliably measuring a potential contrast and the like at a high throughput in a simple structure. The electron beam apparatus for irradiating a sample, such as a wafer, formed with a pattern with an electron beam to evaluate the sample comprises an electron-optical column for accommodating an electron beam source, an objective lens, an ExB separator, and a secondary electron beam detector; a stage for holding the sample, and relatively moving the sample with respect to the electron-optical column; a working chamber for accommodating the stage and capable of controlling the interior thereof in a vacuum atmosphere; a loader for supplying a sample to the stage; a voltage applying mechanism for applying a voltage to the sample, and capable of applying at least two voltages to a lower electrode of the objective lens; and an alignment mechanism for measuring a direction in which dies are arranged on the sample. When the sample is evaluated, a direction in which the stage is moved is corrected to align with the direction in which the dies are arranged.
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Kato Takao
Nakasuji Mamoru
Noji Nobuharu
Satake Tohru
Watanabe Kenji
Ebara Corporation
Lee John R.
Souw Bernard E.
Westerman Hattori Daniels & Adrian LLP
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