Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2008-06-10
2008-06-10
Vanore, David (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
C250S306000, C250S307000, C250S492100, C250S492200, C250S492300
Reexamination Certificate
active
07385197
ABSTRACT:
Disclosed is an electron beam apparatus, in which a plurality of electron beams is formed from electrons emitted from an electron gun21and used to irradiate a sample surface via an objective lens28, said apparatus comprising: a beam separator27for separating a secondary electron beams emanating from respective scanned regions on the sample from the primary electron beams; a magnifying electron lens31for extending a beam space between adjacent beams in the separated plurality of secondary electron beams; a fiber optical plate32for converting the magnified plurality of secondary electron beams to optical signals by a scintillator and for transmitting the signals; a photoelectric conversion device35for converting the optical signal to an electric signal; an optical zoom lens33for focusing the optical signal from the scintillator into an image on the photoelectric conversion device; and a rotation mechanism36for rotating the photoelectric conversion device35around the optical axis.
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Hatakayama Masahiro
Kaga Toru
Murakami Takeshi
Nakasuji Mamoru
Noji Nobuharu
Ebara Corporation
Souw Bernard
Vanore David
Westerman, Hattori, Daniels & Adrian , LLP.
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