Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent
1992-11-27
1995-05-02
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
250396ML, H01J 3714
Patent
active
054122090
ABSTRACT:
An electron beam apparatus comprises an electron beam source, a unit for irradiating an electron beam on a specimen, a detector for secondary electrons, an electrode for generating an electric field sufficient to draw out secondary electrons in a recess in the specimen from the recess, and a unit for generating a magnetic field for focusing secondary electrons drawn out of the recess. With this construction, the secondary electrons drawn out of the recess by the electric field reach the detector without being attracted by the electrode. By adopting this construction, a contact hole of high aspect ratio formed in a semiconductor device and having a small diameter and a large depth can be observed.
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Review of Scientific Instruments, vol. 60, No. 11, 1189, New York US, pp. 3434-3441, Z. Shao, "High-resolution low-voltage electron optical system for very large specimen".
Journal of Vacuum Science and Technology: Part B, vol. 8, No. 5, 990, New York US, pp. 1152-1157, K. Saito et al., "A scanning electron microscope for trench observation".
Iwamoto Hiroshi
Komoda Tsutomu
Okura Akimitsu
Otaka Tadashi
Tobita Issei
Anderson Bruce C.
Hitachi , Ltd.
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