Electron beam apparatus

Details Electron beam apparatus Electron beam apparatus

2005-03-08

2005-03-08

Font, Frank G. (Department: 2883)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

30

Reexamination Certificate

active

06864482

ABSTRACT:
An electron beam (4) to be irradiated onto a sample (10) is two-dimensionally scanned by a scanning coil (9), and secondary electrons generated from the sample (10) by the scanning are detected by a secondary electron detector (13). A deflection coil (15) for image shifting is used for electrically deflecting the primary electron beam to shift a field of view for image shift in an arbitrary direction by an arbitrary amount. By the image shift, the primary electron beam (4) to be irradiated onto the sample is energy dispersed to degrade the resolution. However, an E×B field producer (30) for dispersion control gives the primary electron beam energy dispersion in the opposite direction and having the equal magnitude. Therefore, the energy dispersion produced in the primary electron beam by the image shift is automatically corrected.

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patent: 2821153 (1998-08-01), None

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