Electrolysis: processes – compositions used therein – and methods – Electrolytic erosion of a workpiece for shape or surface... – With mechanical abrasion or grinding
Reexamination Certificate
2007-03-22
2009-08-04
Wilkins, III, Harry D (Department: 1795)
Electrolysis: processes, compositions used therein, and methods
Electrolytic erosion of a workpiece for shape or surface...
With mechanical abrasion or grinding
C205S641000
Reexamination Certificate
active
07569135
ABSTRACT:
The present invention replaces all or a portion of substrate processing by chemical-mechanical polishing with electrolytic processing using deionized water, ultrapure water or the like. An electrolytic processing apparatus comprises: a chemical-mechanical polishing section for chemically-mechanically polishing a surface of a substrate; an electrolytic processing section having a processing electrode and a feeding electrode, and also having an ion exchanger provided at least either between the substrate and the processing electrode or between the substrate and the feeding electrode, for electrolytically processing a surface of a workpiece under existence of a solution by applying a voltage between the processing electrode and the feeding electrode; and a top ring capable of freely moving between the chemical-mechanical polishing section and the processing electrode section.
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Japanese Office Action issued Oct. 16, 2008 with an English translation.
Japanese Office Action issued Oct. 23, 2008 with an English translation.
Kobata Itsuki
Kumekawa Masayuki
Noji Ikutaro
Shirakashi Mitsuhiko
Yasuda Hozumi
Ebara Corporation
Wenderoth , Lind & Ponack, L.L.P.
Wilkins, III Harry D
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